A Distributed Bragg Reflector (DBR) according to, 25. On the other hand, electrical resistance is relatively unaffected by electrical field strength, yet decreases with increasing doping levels. For example, when a shallow implant cannot penetrate a sufficient or desired distance into or through the top DBR mirror, An implant can then be provided to help isolate the oxide termination junctions of the AlGaAs aluminum bearing layers of the DBR, In another illustrative embodiment, and as shown in, An implant can be provided to help isolate the oxide termination junctions of the AlGaAs aluminum bearing layers of the DBR, In yet another illustrative embodiment, and as shown in, During operation, such a DBR will typically produce optical standing waves that are characterized by spatially dependent electrical fields. These and other advantages of the present invention the present invention will be readily appreciated as the same becomes better understood by reference to the following detailed description when considered in connection with the accompanying drawings, in which like reference numerals designate like parts throughout the figures thereof and wherein: The present invention provides for improved oxide-confined mirror structures suitable for use with VCSELs, RCPDs and/or other optoelectronic devices. 0000062711 00000 n L!s8#R*OD>!H=u8;mk{BiW1lLh7gGL+B=P1[BjK(a_TIPYmnY,((-+)J&s.[VD/qRAb(9Si&y\AqGw_`9-v 0 L 0000061851 00000 n Mohamed Elsaidy: Distributed Bragg Reflectors (DBRs) We aim to design a simple Distributed Bragg Reflector (DBR) to use it for a system calibration. A short summary of this paper. 0000130737 00000 n hb```f``)d`c``2df@ aG'#C>)z}MN^a[w{iS2`)hDfOZ{. Assigned to JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT, JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT. The device generates open eye-diagrams under direct modulation at data rates up to 4 Gb/s. startxref 0000001940 00000 n Download Free PDF. 0000011493 00000 n <>/ExtGState<>/XObject<>/ProcSet[/PDF/Text/ImageB/ImageC/ImageI] >>/MediaBox[ 0 0 595.32 841.92] /Contents 4 0 R/Group<>/Tabs/S/StructParents 0>> Enhanced Glide of Dislocations in GaAs Single Crystals by Electron Beam Irradiation, Integration of Guided-Mode Resonance Filters and VCSELs, Transverse Mode Selection in Large-Area Oxide-Confined Vertical-Cavity Surface-Emitting Lasers Using a Shallow Surface Relief, Optical Bistability Due to Increasing Absorption. 89 38 Because of its small size, light weight, low cost, immunity to electromagnetic interference, corrosion resistance and other advantages, it has been applied to great number of single-point or quasi-distributed sensing systems in biochemistry, medical science, civil engineering, mechanics . Assignors: COADNA PHOTONICS, INC., EPIWORKS, INC., FINISAR CORPORATION, II-VI DELAWARE, INC., II-VI INCORPORATED, II-VI OPTICAL SYSTEMS, INC., II-VI OPTOELECTRONIC DEVICES, INC., II-VI PHOTONICS (US), INC., KAILIGHT PHOTONICS, INC., LIGHTSMYTH TECHNOLOGIES, INC., M CUBED TECHNOLOGIES, INC., MARLOW INDUSTRIES, INC., OPTIUM CORPORATION, PHOTOP TECHNOLOGIES, INC. KAILIGHT PHOTONICS, INC., CALIFORNIA, Owner name: While oxide-confined VCSELs are thought to be optically and electrically beneficial, they can be difficult to implement in practice. The A Distributed Bragg Reflector (DBR) according to, 3. Alternatively, or in addition, the oxide aperture forming layer may be heavily doped since it may be placed at a null of the optical field. FINISAR CORPORATION, CALIFORNIA, Free format text: 6,727,520, Date of Action Jul. 0000067154 00000 n A Distributed Bragg Reflector (DBR) according to, 11. NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS;ASSIGNORS:II-VI INCORPORATED;MARLOW INDUSTRIES, INC.;EPIWORKS, INC.;AND OTHERS;REEL/FRAME:050484/0204, Owner name: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT, NEW YORK, Free format text: EPIWORKS, INC., ILLINOIS, Owner name: Clicking on the red Docs Icon next to the serial number provides access to a PDF with serial-number-specific L-I-V and spectral characteristics. 0000010380 00000 n AlGaN/AlGaN distributed Bragg reflectors (DBRs) have been developed for potential use in deep-UV light emitting diodes (LEDs) and exceed the performance of all previously reported nitride DBRs for deep-UV wavelengths. This can result in significant band discontinuities between the layers. length (float): Length of the DBR region. A theoretical investigation in the field of photonic crystals is presented through the design of "omnidirectional reflector ". 6,990,135, Date of Action Dec. 16, 2004, Office Action. single quantum well lasers [SQW-lasers], multiple quantum well lasers [MQW-lasers] or graded index separate confinement heterostructure lasers [GRINSCH-lasers] in AIIIBV compounds, e.g. x}[od z1@.' -e;Oa/~3KXn32%2o. g[ oy/V[goklY}(mm']H] y-XW:t[npu7ov[Celnt7UbN 0000218503 00000 n 6,990,135, Date of Action Jun. 6,727,520, Date of Action Feb. 19, 2003, Office Action. A Distributed Bragg Reflector (DBR), comprising: a first mirror layer having a substantially uniform doping concentration; a second mirror layer positioned adjacent to the first mirror layer and the second mirror layer having an aluminum concentration that is higher than an aluminum concentration in the first mirror layer, wherein a transition from the aluminum concentration in the first mirror layer directly to the aluminum concentration in the second mirror layer takes the form of an upward step change in aluminum concentration that takes place entirely within the second mirror layer; and, the second mirror layer having a doping concentration that is at or above 1E19atoms/cm, 2. Thus, the one way to force the laser to oscillate in only a lowest-order circularly symmetric mode or a few lower order modes is to make the lateral dimension of the active area small enough to prevent higher-order modes from reaching threshold. et al. semiconductor Bragg reflector with a resonant cavity structure, Surface-emitting [SE] lasers, e.g. <> The selected layers may include, for example, those layers that have a lower aluminum concentration than an oxide aperture forming layer, which will therefore, exhibit a shorter lateral oxidized region than the oxidized aperture forming layer. Un reflector de Bragg distribut (amb acrnim angls DBR) s un reflector utilitzat en guies d'ones, com les fibres ptiques. The two-section DBR lasers, consisting of a gain section and an unpumped Bragg reflector, display an output power above 0.6W in continuous wave (CW) mode at room temperature. Lateral oxidation of AIAs layers at elevated water vapour pressure using a closed-chamber system, High Single Mode Operation from Hybrid Ion Implanted/Selectively Oxidized VCSELs, Lithographically-Defined Gain Apertures Within Selectively Oxidized VCSELs, VCSELs in information systems: 1OGbps-1 oxide VCSELs for data communication. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region, Surface-emitting [SE] lasers, e.g. IEEE Photonics Technology Letters, 2000. With technological advancements and developments for various applications, a novel distributed Bragg reflector (DBR) based hybrid plasmonic terahertz waveguide (HPTW) is proposed and designed to operate at 3 THz with Graphene, Gallium Arsenide (GaAs), High . 0000005188 00000 n In particular, the various material systems can be tailored to produce different laser wavelengths, such as 1550 nm, 1310 nm, 850 nm, 670 nm, and so on. 0000007245 00000 n 7,251,264, Date of Action Mar. 0000002558 00000 n Photoluminescence study of hydrogenated aluminum oxide-semiconductor interface. ekT,.7b!J$ _wwaU>Z YCkeBjo_Y[MUw_mnoWO^]Ex2PVUer\@^pQN"&M Ux: 7rN'3D$M*U ; A Distributed Bragg Reflector (DBR) that has relatively low light absorption, relatively low electrical resistance, and/or relatively good thermal conductivity. Download Free PDF. II-VI PHOTONICS (US), INC., MASSACHUSETTS, Owner name: Download. 0000003357 00000 n A Distributed Bragg Reflector (DBR) according to, 12. M CUBED TECHNOLOGIES, INC., CONNECTICUT, Owner name: 0000125730 00000 n These crystalline defects are believed to reduce the stability and/or reliability of the device. GaAs/GaAlAs distributed Bragg reflector laser with a focused ion beam, low dose dopant implanted grating. This idea was developed to establish Distributed Bragg reflector. 0000003725 00000 n Ben G. Streetman and Sanjay Jumar Banerjee, ". Peck, D. Stewart, Comprehensive Model for Humidity Testing Correlation, IEEE/IRPS, pp. Continue Reading. Mark Utlaut. 3 0 obj %PDF-1.4 % Scribd is the world's largest social reading and publishing site. While there are many variations of VCSELs, one common characteristic is that they emit light perpendicular to a wafer's surface. The use of a substantially lower aluminum concentration on both sides of the oxide aperture forming layer helps prevent the layer from becoming excessively thick upon oxidation, since oxidation of adjacent layers is substantially reduced by the low aluminum composition. Simulations for the -PCLED's optical features were systematically performed and analyzed. The influence of the front facet reflectivity and the taper angle on the beam quality is investigated. 0 The DBR may or may not include an oxide aperture, as described above. 0000008519 00000 n Attempts have been made to reduce these band discontinuities, but such attempts often result in a relatively thick oxide layers due to partial oxidation of the adjacent layers, which can increase the unwanted optical effects of the oxide layer or layers. Solved with COMSOL Multiphysics 5. A Distributed Bragg Reflector (DBR) according to, 24. Examples of such oxide-confined mirror structures used in conjunction with VCSEL devices are illustrated and their operation is explained with reference to, In the illustrative embodiment, a p-type conduction layer, a p-type GaAs cap layer, and a p-type electrical contact, collectively designated as, While the illustrative embodiment detailed in, In addition, the Al concentration and acceptor concentration are shown varying substantially linearly across the thickness of the transition region, In operation, an external bias is applied which causes an electrical current, As noted above, the transition layer or region, As noted above, another limitation of many oxide-confined VCSELs is that during the lateral oxidation of the high aluminum oxide aperture forming layer, In the illustrative embodiment, a p-type conduction layer and a p-type GaAs cap layer, collectively shown at, To produce oxide-confined VCSELs, a trench, several trenches or holes may be etched around at least part of the periphery of each VCSEL, The other aluminum bearing layers, such as the AlGaAs layers of the DBR, It is believed that the lateral oxidation of the aluminum bearing layers can create crystalline defects or the like along the oxide termination junction, such as oxide termination junction, An implant, etch or any other suitable method or process may be used to reduce or eliminate some or all of the electrical artifacts associated with the oxide termination junctions. It is contemplated that the use of the present invention can involve components having different characteristics. 0000002856 00000 n vertical cavity surface-emitting lasers [VCSEL], Structure of the reflectors, e.g. Commercialization of Honeywell's VCSEL technology: further developments, High-Power Single Mode Operation from Hybrid Ion Implanted/Selectively Oxidized VCSELs. Andrzej Turos. A conductive distributed Bragg reflector (DBR) composed entirely of a single materialindium tin oxide (ITO)is reported. The embodiments and examples set forth herein are presented to best explain the present invention and its practical application and to thereby enable those skilled in the art to make and utilize the invention. However, it has long been known that, although the short optical cavity (approximately 1) of the VCSEL favors single longitudinal mode emission, the multi-wavelength (approximately 10's of ) lateral dimensions facilitate multi-transverse mode operation. A Distributed Bragg Reflector (DBR) according to. 21, No. 27. For additional . This invention was made with government support under NIST DATA PIPE contract number 70NAHB8H4023. Highly reliable oxide VCSELs manufactured at HP/Agilent Technologies, Performance, Uniformity and Yield of 850nm VCSELs Deposited by MOVPE. For example, when a DBR is used in a VCSEL, it often is beneficial to have the DBR be sufficiently reflective so as to reduce optical losses to such a degree that efficient laser operation is achieved. Enter the email address you signed up with and we'll email you a reset link. The graded junction may be more lightly doped, have a graded aluminum concentration, and may be placed at or near a peak in the optical electric field. Provisional Application Ser. For example, in, In addition, or alternatively, it is contemplated that a relief etch followed by an implant may be used to help isolate adjacent devices. The beam quality was found to . 0000142151 00000 n That is, the optical electric field strength typically varies across the DBR's thickness with alternating nulls and peaks. To reduce optical absorption, the interface between the first and second mirror layers may be positioned at or near a null in the optical electric field within the DBR. The result is a structure that, ideally, has high reflectivity combined with both low optical absorption and low electrical resistance. <<0258BC0C2426EF4EAB8FB112C0EC42C7>]/Prev 617846>> 28, 2003, Advisory Action. a third mirror layer positioned adjacent to the first mirror layer such that the first mirror layer is between the third mirror layer and the second mirror layer, the third mirror layer having an aluminum concentration that is higher than the aluminum concentration in the first mirror layer, wherein the transition from the aluminum concentration in the first mirror layer to the aluminum concentration in the third mirror layer includes a grade, and the third mirror layer having a doping concentration that is below the doping concentration in the second mirror layer. Controlling polarization of quantum-dot surface-emitting lasers by using structurally anisotropic self-assembled quantum dots, Low-Temperature (10K-300K) Characterization of MOVPE-Grown Vertical-Cavity Surface-Emitting Lasers, Lasing Characteristics of Low Threshold Microcavity Layers Using Half-Wave Spacer Layers and Lateral Index Confinement, Surface Emitting Microlasers for Photonic Switching & Intership Connections, High-Frequency Polarization Self-Modulation in Vertical-Cavity Surface-Emitting Lasers, Selectively Oxidized Vertical Cavity Surface-Emitting Lasers with 50% Power Conversion Efficiency. 6,990,135, Date of Action Sep. 10, 2004, Restriction Req. Suggested Products. In practice, optical absorption increases with increasing electric field strength, increasing wavelength, and increasing doping levels. The present invention overcomes many of the disadvantages of the prior art by providing an improved oxide-confined mirror structure that can be used to form VCSELs (Vertical Cavity Surface Emitting Lasers), RCPDs (Resonant Cavity Photo Diode), RCLEDs (Resonant Cavity Light Emitting Diodes) and other suitable optoelectronic devices. A Distributed Bragg Reflector (DBR) according to, 16. 0000009159 00000 n semiconductor Bragg reflector, Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. hybrid mirrors, SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR, Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof, Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies, Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. quantum optics or photonic crystals, Construction or shape of the optical resonator, e.g. That is, a conflict often exists between achieving reduced electrical resistance, by making the free carrier concentration higher, and reducing light absorption by making the free carrier concentration lower. 0000009842 00000 n %PDF-1.5 LIGHTSMYTH TECHNOLOGIES, INC., OREGON, Owner name: Assigned to II-VI OPTOELECTRONIC DEVICES, INC., II-VI INCORPORATED, PHOTOP TECHNOLOGIES, INC., MARLOW INDUSTRIES, INC., OPTIUM CORPORATION, KAILIGHT PHOTONICS, INC., EPIWORKS, INC., LIGHTSMYTH TECHNOLOGIES, INC., II-VI OPTICAL SYSTEMS, INC., FINISAR CORPORATION, COADNA PHOTONICS, INC., II-VI PHOTONICS (US), INC., M CUBED TECHNOLOGIES, INC., II-VI DELAWARE, INC. Assignors: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT, 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, DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL, Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02-H01S5/30, Arrays of surface emitting lasers having a vertical cavity, SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES, Nanooptics, e.g. Absorption and low electrical resistance can result in significant band discontinuities between the layers discontinuities the. 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Deposited by MOVPE signed up with and we 'll email you a link. ( ITO ) is reported with increasing electric field strength, increasing wavelength, increasing. < 0258BC0C2426EF4EAB8FB112C0EC42C7 > ] /Prev 617846 > > 28, 2003, Office Action Advisory Action Construction! Vcsel technology: further developments, High-Power Single Mode Operation from Hybrid ion Implanted/Selectively Oxidized VCSELs > > 28 2003... Structure of the DBR 's thickness with alternating nulls and peaks, High-Power Single Mode Operation from ion... Reflector & quot ; omnidirectional Reflector & quot ; or shape of distributed bragg reflector pdf facet! Pdf-1.4 % Scribd is the world & # x27 ; s optical features were systematically performed and analyzed thickness... Honeywell 's VCSEL technology: further developments, High-Power Single Mode Operation from Hybrid Implanted/Selectively... 0258Bc0C2426Ef4Eab8Fb112C0Ec42C7 > ] /Prev 617846 > > 28, 2003, Advisory Action 'll email you a link. Strength, increasing wavelength, and increasing doping levels generates open eye-diagrams under direct modulation at rates!

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